Comparison ledger
ABM -407B-1-S-CES293 Robot, Edwards IGX 100 M, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IGX 100 MEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Edwards IGX 100 M |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[3] | — |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Peak pumping speed | — | 105 m³/h (62 cfm, 1750 l/min)[2] |
| Ultimate pressure | — | 5.00E-03 mbar (3.75E-03 Torr, 0.50 Pa)[2] |
| Power at 700 Torr exhaust | — | 1 kW[2] |
| AUC (Active Utility Control) power | — | 0.05 kW[2] |
| Water inlet flow | — | 1 slm (requires constant flow valve accessory)[2] |
| Nitrogen purge flow | — | 4 or 14 slm[2] |
| Footprint (excluding exhaust) | — | 0.20 m²[2] |
| Weight | — | 120 kg (264.5 lbs)[2] |
| Inlet connection | — | ISO63[2] |
| Outlet connection | — | NW25[2] |
| Noise at ultimate | — | < 55 dB(A)[2] |
| Input voltage options | — | 200–230 V and 380–460 V, 50/60 Hz, 3-phase[1] |
| Part number (200–230 V) | — | A54612958[1] |
| Part number (380–460 V) | — | A54612959[1] |
| SS variant part number (200–230 V) | — | A53612958[2] |