Comparison ledger
ABM -407B-1-S-CES293 Robot, Nikon VMA 2520, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VMA 2520Nikon | |
|---|---|---|
| OEM | ABM | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Nikon VMA 2520 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Type | — | Automated measuring system[2] |
| Application | — | 3D workpieces[2] |
| Stroke (X x Y x Z) | — | 250 x 200 x 200 mm[2] |
| Measuring capability | — | 250 x 200 x 200 mm[2] |
| Working distance | — | 73.5 mm[2] |
| Z-axis stroke | — | 200 mm[3] |
| Optical magnification | — | 0.35 to 3.5x[2] |
| On-screen magnification | — | 12 to 120x[2] |
| Camera | — | 1/3-in. 3CCD color progressive scan[2] |
| Auto focus | — | Vision AF and optional Laser AF[2] |
| Touch probe | — | Renishaw TP200/TP20 (option)[2] |
| Minimum readout | — | 0.1 µm[2] |
| Maximum workpiece weight | — | 15 kg[2] |
| Power source | — | 100-240 V, 50/60 Hz[2] |
| Power consumption | — | 5-2.5 A excluding host computer and peripherals[2] |
| Illumination | — | White LED illumination; 8-segment white LED ring[2] |
| Main body dimensions | — | 565 x 690 x 740 mm[2] |
| Main body weight | — | 72 kg[2] |
| Controller dimensions | — | 145 x 400 x 390 mm[2] |
| Controller weight | — | 13 kg[2] |