Comparison ledger
ABM -407B-1-S-CES293 Robot, Tenney BTC Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BTC TemperatureTenney | |
|---|---|---|
| OEM | ABM | Tenney |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Tenney BTC |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | BTC[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Temperature range | — | -70°C to +200°C[3] |
| Inside Dimensions | — | 20” L x 19” W x 22” H[3] |
| Configuration | — | 2” Cable port[3] |
| Voltage | — | 230V, 1 Ph, 60 Hz, 23A[3] |
| Cable port | — | 2"[3] |
| Power | — | 230V, 1 Ph, 60 Hz, 23A[3] |
| Product type | — | Temperature chamber[3] |
| Line | — | Benchmaster temperature and humidity test chambers[1] |
| Internal workspace | — | 5 cubic feet[1] |
| Inside dimensions | — | 20 in L x 19 in W x 22 in H[3] |
| Temperature control | — | ±1.0°C after stabilization[1] |
| Humidity control | — | N/A or ±5% RH after stabilization, depending on model[1] |
| Air flow rate | — | 115 CFM[1] |
| Heat capacity | — | 2000 W[1] |
| Refrigeration | — | Two 1 HP reciprocating compressors[1] |
| Standard port | — | 3-inch port on left side[1] |