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-407B-2-S-CE-S293 RobotversusXDS 10 Scroll

ABM -407B-2-S-CE-S293 Robot, Edwards XDS 10 Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
-407B-2-S-CE-S293 RobotABM
XDS 10 ScrollEdwards
OEMABMEdwards
Category——
Wafer size——
Process node——
Introduced——
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FamilyABM -407B-2-S-CE-S293 RobotEdwards XDS 10 Scroll
Cited variants—
  • Edwards XDS 10 (1-phase 115/230 V, North America)[1]
  • Edwards XDS 10 (1-phase 115/230 V, Europe/UK)[1]
  • Edwards XDS 10 (1-phase 100/200 V, Japan)[1]
  • Edwards XDS 10 (3-phase 200/380/415/460 V)[1]
Specifications
ModelABM-407B-2-S-CE-S293[2]—
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Maximum displacement (50 Hz)—11.3 m³/h[1]
Maximum displacement (60 Hz)—13.4 m³/h[1]
Ultimate vacuum (total pressure, 60 Hz)—6×10⁻² mbar / 4.5×10⁻² Torr[1]
Inlet connection—NW25 (KF25)[1]
Outlet connection—NW25 (KF25)[1]
Weight—24.5 kg (54 lb)[1]
Motor power—0.3 kW[1]
Noise level—55 dB(A) at 1 m (50 Hz)[1]
Vibration—<4.5 mm/s (rms)[1]
Operating temperature range—10 °C to 40 °C[3]
Motor rotational speed (60 Hz)—1730 rpm[3]
Dimensions (LxWxH)—427 x 290 x 249 mm[3]
Maximum water vapor inlet pressure—35 mbar[1]
-407B-2-S-CE-S293 Robot entryXDS 10 Scroll entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]idealvac.comidealvac.com