Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Lam Research Exelan Flex, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Exelan FlexLam Research | |
|---|---|---|
| OEM | ABM | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2018 Manufacture date |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Lam Research Exelan Flex |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[3] | Exelan Flex[4] |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| OEM | — | Lam Research[4] |
| Asset description | — | Lam Exelan Flex Chamber[4] |
| Wafer size | — | 12 inch[4] |
| Configuration | — | 2300 Exelan Flex 300mm configuration[5] |
| Process type | — | Oxide Etch[5] |
| Vintage | — | 2005[5] |
| Tool description | — | 2300 Exelan Flex FX - Chamber Only[1] |
| Current configuration | — | 300mm[1] |
| Status | — | Available[1] |
| Date of manufacture | — | 2018-01-01[2] |
| Configured for | — | To be determined[2] |
| Process module | — | 2300 FLEX GX OPTIONS[2] |