Comparison ledger
ABM -407B-2-S-CE-S293 Robot, MKS Series 49UL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Series 49ULMKS | |
|---|---|---|
| OEM | ABM | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2020 Release announcement |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | MKS Series 49UL |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Heater jacket material | — | Polyimide or Teflon[2] |
| Temperature range | — | 25°C to 200°C[2] |
| Local LED status display | — | Included[2] |
| Low particulate generation and low VOC | — | Designed for low particulate generation and low VOC emissions[2] |
| Product type | — | Thermal Management System[2] |
| Heater jacket materials | — | Polyimide or Teflon heater jacket[2] |
| Heater jacket options | — | S49UL Polyimide Heater; S49UL PTFE-Woven Heater[3] |
| Temperature setting range | — | 35°C to 200°C[3] |
| Status display | — | Local LED status display[2] |
| Communications | — | Modbus RTU over RS485[3] |
| Compliance | — | CE; UL 61010-1 Recognized[3] |
| Safety certification | — | UL Recognized for Measurement and Control Safety[3] |
| Supply voltage | — | 100-120 VAC or 200-240 VAC, 50/60 Hz[3] |