Comparison ledger
Agilent 11980 A, Filmetrics Profilm3D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | Profilm3DFilmetrics |
|---|---|---|
| OEM | Agilent | Filmetrics |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Filmetrics Profilm3D |
| Cited variants | — |
|
| Specifications | ||
| Wavelength Range | 1250-1600 nm[2] | — |
| manufacturer | — | Filmetrics[3] |
| model | — | Profilm3D[3] |
| instrument type | — | optical profiler[3] |
| measurement method | — | profilometry[3] |
| step-height accuracy | — | 0.7% for an 8 µm step[3] |
| maximum silicon thickness stated on source page for tabletop/mapping/production systems | — | up to 2 mm thick[3] |
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