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11980 AversusNewview 9000 3D Optical Surface Profiler

Agilent 11980 A, Zygo Newview 9000 3D Optical Surface Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
OEMAgilentZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AZygo Newview 9000 3D Optical Surface Profiler
Specifications
Wavelength Range1250-1600 nm[1]—
Measurement Technology—Coherence Scanning Interferometry (CSI)[2]
Precision—Sub-nanometer precision at all magnifications[2]
Measurement Capabilities—Smooth, rough, flat, sloped, and stepped surfaces; flatness, roughness, waviness, thin films, step heights[2]
Measurement Speed—High-speed measurements completed in seconds[2]
Optics—Triple-zoom turret customizable with discrete zoom optics[2]
Sample Staging—Flexible configurations from fully manual to fully automated with encoded travel[2]
Standards Compliance—2D and 3D correlation results compliant with ISO 25178 and ISO 4287[2]
Vibration Robustness—SureScan technology and built-in isolation system for reliable metrology in vibration-prone environments[2]
SmartPSI Technology—Ultra-fast profiling of ultra-smooth surfaces[2]
Software—Mx software for instrument control, analysis, and measurement automation[2]
Installation Configurations—Benchtop or production-style installations with optional stand and workstation; open work area[2]
Sample Preparation—No sample preparation required[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]avantierinc.comavantierinc.com