Waferpedia

Comparison ledger

SBE-6versus0010-13622 RF Match for

AJA SBE-6, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA SBE-6Applied Materials 0010-13622 RF Match for
Specifications
SeriesSBE-6 Series[1]—
TypeSputter Beam Epitaxy (SBE) Deposition System[1]—
Deposition capabilityCo-deposition or sequential deposition of up to six distinct materials[1]—
Cross-contaminationMinimizes cross-contamination[1]—
Deposition qualityRivals molecular beam epitaxy (MBE)[1]—
Deposition rate calibrationQuartz crystal monitor provides deposition rate calibration from elemental targets[1]—
Configuration—High Efficiency HE RF Match-Bias[2]
Model—0010-13622[2]
Product Type—RF Match for PVD (Physical Vapor Deposition)[2]
Feature—High Efficiency HE RF Match-Bias[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing