Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer TMH 071 P Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | TMH 071 P VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer TMH |
| Specifications | ||
| Oil | — | PM 073 073 -T[1] |
| Supply | — | 60 l/s[1] |
| Mass | — | 2.8 kg[1] |
| Manufacturer | — | Pfeiffer[1] |
| Model | — | TMH 071 P[1] |
| Asset # | — | 143047[1] |
| Vintage | — | 2020[1] |
| Pumping speed | — | 60 l/sec for N2[2] |
| Inlet flange | — | DN 63 ISO-K[2] |
| Compression ratio (N2) | — | > 10^11[4] |
| Ultimate pressure | — | < 7 x 10^-8 Torr[4] |
| Type | — | vacuum pump[3] |
| Controller | — | TC 100[5] |
| Part number | — | PMP03195 / PMC01692 / G3170-80061[5] |