Comparison ledger
Applied Materials 0010-03254 E Chuck, SUSS MicroTec Twin Gamma, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Twin GammaSUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec Twin Gamma |
| Specifications | ||
| Machine type | — | Coater and developer[1] |
| Wafer size | — | 4 inch and 6 inch wafers[1] |
| System structure | — | Separate coating and developing modules with integrated wafer transfer station[1] |
| Coater robot | — | Genmark GB4S with needle gripper[1] |
| Developer robot | — | Genmark GB4S with needle gripper[1] |
| Coater cups | — | 2[1] |
| Developer cups | — | 3[1] |