Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusPC2000

Applied Materials 0010-03485 Magnet Assy, Oxford Instruments PC2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
PC2000Oxford Instruments
OEMApplied MaterialsOxford Instruments
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyOxford Instruments PC2000
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
System type—plasma system[5]
User login system—Password controlled user login with different levels of access[5]
Data logging—Continuous system data logging for traceability of each wafer and process run[5]
Communication standard—Fully GEM/SECS compatible[5]
Cluster control—Ability to control a tool cluster from a single interface and PC[5]
Operating system—Windows XP[6]
PLC type—Black PLC (older, not upgradeable)[6]
Software type—Process tool software[5]
Interface—Front-end visual[5]
Recipe management—Yes[5]
User access control—Password-controlled[5]
Communication protocol—GEM/SECS compatible[5]
Host operating system—Windows XP[6]
Customization—Per machine[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]nanofab.utah.edunanofab.utah.edu
  6. [6]mtl.mit.edumtl.mit.edu