Waferpedia

Comparison ledger

0010-03485 Magnet Assyversus8800

Applied Materials 0010-03485 Magnet Assy, SVG 8800, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
8800SVG
OEMApplied MaterialsSVG
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssySVG 8800
Cited variants—
  • Dual Coat with Soft Bake[1]
  • 3-Resist Configuration with EBR and Backside Cleaning[2]
Specifications
ConfigurationWP AL 300mm PVD[3]Dual Coat with soft bake[1]
OEMApplied Materials[3]SVG[8]
Model0010-03485[3]8800[8]
DescriptionMAGNET ASSY, WP AL 300MM PVD[4]—
ProcessPVD[5]—
Wafer size300mm[6]6 inch[8]
VersionSpares[6]—
Part Number0010-03485[3]—
ManufacturerApplied Materials[3]—
Process TypePVD (Physical Vapor Deposition)[3]—
Application (Material)Aluminum (AL)[3]—
Wafer Diameter (associated)300 mm[3]—
Type—Single-track coater and developer[7]
Spindle acceleration—Up to 50,000 RPM/second[7]
Programmable dispense arm—Yes[7]
Automatic cassette wafer handling—Yes, dual load and unload[7]
Edge bead removal—Top nozzle[7]
Backside rinse—Bottom nozzle[7]
Hot plate temperature range—Up to 300 °C[7]
Developer dispense type—Pressurized nozzle[7]
Developer mode—Dynamic or static[7]
Developer rinse—DI water rinse[7]
Coater/Developer type—Photoresist coating and developing[7]
Spindle Motor Acceleration—50,000 RPM/second[7]
Edge Bead Removal—Top nozzle for EBR[7]
Backside Rinse—Bottom nozzle for backside rinse[7]
Developer Type—Single track with pressurized dispense nozzle[7]
Cassette Handling—Automatic with dual load and unload[7]
Supported Wafer Size—6 inch[8]
Equipment type—Coater / Developer[8]
Operating mode—Single track dispense photoresist spinner[7]
Cassette handling—Automatic cassette wafer handling with dual load and unload capability[7]
Dispense arm—Programmable dispense arm motion[7]
EBR—Top nozzle for Edge Bead Removal[7]
Hot plate oven—Programmable up to 300 C[7]
Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]semistarcorp.comsemistarcorp.com
  5. [5]layla-ec.comlayla-ec.com
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]nanolab.ucla.edunanolab.ucla.edu
  8. [8]Equipment inventory listing