Comparison ledger
Applied Materials 0010-03485 Magnet Assy, Thermo Fisher Scientific FEI Helios NanoLab 600 FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | Scientific FEI Helios NanoLab 600 FIBThermo Fisher |
|---|---|---|
| OEM | Applied Materials | Thermo Fisher |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | Thermo Fisher Scientific FEI Helios NanoLab 600 FIB |
| Specifications | ||
| Configuration | WP AL 300mm PVD[1] | Dual beam[5] |
| OEM | Applied Materials[1] | — |
| Model | 0010-03485[1] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[2] | — |
| Process | PVD[3] | — |
| Wafer size | 300mm[4] | — |
| Version | Spares[4] | — |
| Part Number | 0010-03485[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Process Type | PVD (Physical Vapor Deposition)[1] | — |
| Application (Material) | Aluminum (AL)[1] | — |
| Wafer Diameter (associated) | 300 mm[1] | — |
| Sample stage | — | 5-Axes motorized X-Y-Z-rotate-tilt stage[5] |
| Step size | — | 100 nm (Minimum)[5] |
| High vacuum | — | 10^-10 mbar[5] |
| X, Y-Axis | — | 150 mm[5] |
| Z-Axis | — | 10 mm[5] |
| Tilt range | — | -5° to +60°[5] |
| Source | — | SCHOTTKY Field emitter[5] |
| Accelerating voltage | — | 350 V to 30 kV (Continuously adjustable)[5] |
| Beam current | — | 1 pA - 22 nA[5] |
| Type | — | Dual beam[5] |
| Vacuum system | — | Edwards XDS10 Scroll pump[5] |
| Travel X, Y-Axis | — | 150 mm[5] |
| Travel Z-Axis | — | 10 mm[5] |
| Repeatability | — | 1 µm at 0°; 2 µ at 52°[5] |
| Electron source | — | SCHOTTKY Field emitter[5] |
| Electron accelerating voltage | — | 350 V to 30 kV (Continuously adjustable)[5] |
| Electron beam current | — | 1 pA - 22 nA[5] |
| Electron resolution | — | 0.9 nm at 15 kV; 1.4 nm at 1 kV[5] |
| Ion source | — | Liquid Gallium ion emitter[5] |
| Ion optics | — | Sidewinder Field emission focused ion beam optics[5] |
| Ion accelerating voltage | — | 0.5 kV to 30 kV (Continuously adjustable)[5] |
| Ion beam current | — | 1.5 pA - 20 nA[5] |
| Ion imaging resolution | — | 5 nm at 30 kV[5] |
| Ion milling resolution | — | 10 nn on Cr thin film[5] |
| Scanner resolutions | — | 512x442, 1024x884, 2048x1768, 4096x3536 pixels[5] |
| Minimum dwell time | — | 25 ns/pixel[5] |
| Patterning maximum resolution | — | 64k x 64k[5] |
| Patterning maximum dwell | — | 25 ms/pixel[5] |
| Detectors | — | In-lens SE and BSE True Lens Detector (TLD); Everhart-Thornely SE Detector (ETD); 14-Segments solid state STEM II detector; Chamber viewing IR CCD camera[5] |
| Controller | — | Microscope controller; LCD Monitor, 19"; Screen resolution 1280x1024; Optical mouse; Chamber door mounted interface for manipulators[5] |
| Imaging resolution | — | 5 nm at 30 kV[5] |
| Milling resolution | — | 10 nn on Cr thin film[5] |
| Resolution | — | 512x442, 1024x884, 2048x1768, 4096x3536 pixels[5] |
| Maximum resolution | — | 64k x 64k[5] |
| Minimum dwell | — | 25 ns/pixel[5] |
| Maximum dwell | — | 25 ms/pixel[5] |
| Screen resolution | — | 1280x1024[5] |
| Instrument type | — | Dual beam focused ion beam (FIB)[5] |
| Stage | — | 5-axis motorized X-Y-Z-rotate-tilt stage[5] |
| Stage travel X/Y | — | 150 mm[7] |
| Stage travel Z | — | 10 mm[5] |
| Vacuum pump | — | Edwards XDS10 scroll pump[5] |
| Sample stage step size | — | 100 nm minimum[5] |
| Maximum dwell time | — | 25 ms/pixel[5] |
| Additional included item | — | Broad beam plasma source ion column (focus 250 µm)[5] |
| Included documentation | — | Manuals included[5] |
| Manipulator | — | Does not include manipulator[5] |
| Stage control | — | 5 axes motorized XYZRT 6 in UHR stage with piezo control[7] |
| Magnification | — | 69x to 2,300,000x[7] |
| Detector | — | Through-lens detection for SE and BSE[7] |
| STEM detector | — | Retractable[7] |
| Stage tilt | — | -10° to +60°[7] |
| Optional accessories | — | Omniprobe Autoprobe 200; Ibss Group GV10x plasma cleaner[7] |