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Comparison ledger

0010-13622 RF Match forversusCentura 5200 High K

Applied Materials 0010-13622 RF Match for, Applied Materials Centura 5200 High K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Centura 5200 High KApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forApplied Materials Centura 5200
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Incl gas box and remote frame[2]
Model0010-13622[1]Centura 5200 High K[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Manufacturer—Applied Materials[2]
Wafer size—8 inch[2]
Category—Deposition[3]
Process type—Depositing high-k dielectric films[4]
Platform family—Applied Materials Centura platform family[4]
Unit type—Single chamber unit, not a complete cluster tool[4]
Chamber version—200 mm[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]fabsurplus.comfabsurplus.com