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0010-13622 RF Match forversus450 Spin

Applied Materials 0010-13622 RF Match for, CEE 450 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsCEE
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forCEE 450 Spin
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Up to 450mm round or 14"x14" square[2]
Model0010-13622[1]450 Spin[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Make—CEE[2]
Category—Deposition[3]
Tool type—Spin coater[2]
Maximum substrate size—Up to 450mm round or 14" x 14" square[2]
Power—208 Voltage[2]
Vacuum—Vacuum[2]
Control/software—Uses internal OS software system[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com