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0010-13627 High Efficiency RF MatchversusXDS 35 i

Applied Materials 0010-13627 High Efficiency RF Match, Edwards XDS 35 i, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
XDS 35 iEdwards
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
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FamilyApplied Materials 0010-13627 High Efficiency RF MatchEdwards XDS
Cited variants—
Specifications
ConfigurationHE, BIAS[2]1750 rpm[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]dry scroll vacuum pump[1]
Power—520W (0.7hp)[3]
Peak pumping speed—35 m3/h (21 cfm)[1]
Ultimate vacuum—0.01 mbar (0.008 Torr)[1]
Nominal rotation speed—1750 rpm[1]
Motor power—520 W[1]
Power at ultimate—440 W[1]
Supply voltage—100-120/200-240 V (+/- 10%)[1]
Supply frequency—50/60 Hz[1]
Weight—48 kg (105 lb)[1]
Inlet connection—NW40[1]
Exhaust connection—NW25[1]
Noise level at ultimate—57 dB(A)[1]
Operating temperature range—5 to 40 C (41 to 104 F)[1]
Product form—oil-free dry scroll vacuum pump[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]edwardsvacuum.comedwardsvacuum.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]idealvac.comidealvac.com