Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusR 301

Applied Materials 0010-13627 High Efficiency RF Match, Seren R 301, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
R 301Seren
OEMApplied MaterialsSeren
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchSeren R 301
Specifications
ConfigurationHE, BIAS[1]Input Power:[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Output Power—300 Watts, 13.56 MHz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing