Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials 0010 47763, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 0010 47763Applied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials 0010 47763 |
| Specifications | ||
| OEM | Applied Materials[1] | Applied Materials[3] |
| Model | 0010-16392[1] | 0010-47763[3] |
| Type | ESC Assembly[1] | Monopolar Dual Heated[4] |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 2nd Source New[3] |
| Description | — | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5] |
| Possible Materials | — | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] |
| Material (possible) | — | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] |
| Application | — | Fixing wafers in etching process (PVD, CVD, ETCH)[4] |
| Quantity available (source) | — | 1[4] |
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