Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Alliance 6 9400 PTX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Alliance 6 9400 PTXLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Alliance |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 3 Chamber[3] |
| Voltage | — | 208 VAC[4] |
| Full Load Current | — | 43 Amps[4] |
| Capacity of Main Breaker | — | 10 kA[4] |
| Number of Chambers | — | 3 Chamber[3] |
| Frequency | — | 50/60 Hz[4] |
| Operating System | — | Upgraded to Windows 7[4] |
| Endpoint Detection | — | OES (Optical Emission Spectroscopy)[4] |
| Chamber Type | — | Poly Etch Chambers[4] |
| Number of Poly Etch Chambers | — | All 3[4] |
| Vintage | — | 2000[4] |
| Asset # | — | 132832[5] |
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