Comparison ledger
Applied Materials 0010-16392 ESC Assembly, SCREEN SU 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | SU 2000SCREEN |
|---|---|---|
| OEM | Applied Materials | SCREEN |
| Category | Etch | Etch |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | SCREEN SU 2000 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 6 inch, 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Wafer size | — | Wafer currently configured for 6"[3] |
| Configuration | — | Under OEM Maintenance[3] |
| Station List | — | Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[3] |
| Chemicals Used | — | Stripper, Qz, ST (also used for NMP in place of one)[3] |
| Application | — | Single wafer spray solvent tool[3] |
| Sation List | — | Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[4] |
| Chemicals | — | Stripper, Qz, ST, NMP[3] |
| Vintage | — | 2017[3] |
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