Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tegal 900e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 900eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tegal 900e |
| Cited variants | — | |
| Specifications | ||
| OEM | Applied Materials[2] | — |
| Model | 0010-16392[2] | — |
| Type | ESC Assembly[2] | — |
| Wafer Size | 300 mm[3] | — |
| Electrode Configuration | Dual[3] | — |
| Tool type | — | single wafer cassette-to-cassette etch system[1] |
| Process | — | non-critical plasma etch processes[1] |
| Wafer size | — | 3 in to 150 mm wafers[1] |
| Control system | — | Advanced Control System (ACS) field upgrades available for customers already invested in the Tegal 900e Series[1] |
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