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0010-18024 Pyrometer Assemblyversus8

Applied Materials 0010-18024 Pyrometer Assembly, Dektak 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
8Dektak
OEMApplied MaterialsDektak
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyDektak 8
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Measurement Technique—Stylus profilometry[2]
Scan Length Range—50 mm (2 in.) standard; 100 mm (4 in.) optional[2]
Max Wafer Size—200 mm (8 in.)[2]
Step Height Repeatability—7.5 Å, 1 sigma on 1 μm step[2]
Vertical Range—262 μm standard; 1 mm optional[2]
Vertical Resolution—1 Å max (@ 6.55 μm range)[2]
Max Sample Thickness—25.4 mm (1 in.)[2]
Stylus Force—1 to 15 mg with standard LIS 3; 0.03 to 15 mg with N-Lite sensor option[2]
Stylus Options—Stylus radius options from 0.2 to 25 μm; Super Sharp 50 nm stylus for use with N-Lite; High Aspect Ratio (HAR) tips for 10 μm D x 2 μm W trenches or 200 μm D x 20 μm W trenches[2]
Dimensions (W x D x H)—457 mm x 610 mm x 483 mm (18 in. x 24 in. x 19 in.)[2]
Weight—48 kg (105 lbs)[2]
Input Voltage—100-120 VAC / 200-240 VAC, 50-60 Hz[2]
Temperature Range—15 to 30 °C (59 to 86 °F)[2]
Humidity Range—≤ 80%, non-condensing[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]img.antpedia.comimg.antpedia.com