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Comparison ledger

0010-18024 Pyrometer AssemblyversusSU 8010

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi SU 8010, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SU 8010Hitachi
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi SU
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]No PC[2]
Type—Scanning electron microscope (SEM)[3]
Source—Cold field emission (CFE)[3]
Operating voltage range—100 V to 30 kV[3]
Resolution—1.3 nm at 1 kV[3]
Maximum magnification—100kx[3]
Sample size—50 mm diameter x 50 mm diameter[5]
EDS—Yes; EDS (Be 4 ~ U 92)[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]matter-systems.research.gatech.edumatter-systems.research.gatech.edu
  4. [4]nnci.netnnci.net
  5. [5]nanofc2.web.nycu.edu.twnanofc2.web.nycu.edu.tw