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0010-18024 Pyrometer Assemblyversus5200 XP Overlay Measurement

Applied Materials 0010-18024 Pyrometer Assembly, KLA 5200 XP Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA 5200 XP Overlay Measurement
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]50/60 Hz[2]
Software Version—14.70.01[2]
Handler—x2 Open Cassette[2]
Wafer Sizes—4, 6, 8 inch[5]
Frequency—50/60 Hz[2]
Hard Drive—No HDD[3]
Chuck Type—Reflective Host Chuck[4]
Skine Material—Stainless Steel Skins[4]
Fan Box—Fan Box[4]
Printer—Sony Video Hard Copy Printer[4]
Power frequency—50/60 Hz[2]
Additional features (per unit)—Reflective Host Chuck, Stainless Steel Skins, Fan Box, Sony Video Hard Copy Printer[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing