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0010-18024 Pyrometer AssemblyversusEmpyrean

Applied Materials 0010-18024 Pyrometer Assembly, Malvern Panalytical Empyrean, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EmpyreanMalvern Panalytical
OEMApplied MaterialsMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyMalvern Panalytical Empyrean
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Voltage—230 V[2]
Frequency—60 Hz[2]
Power—8 kVa[2]
Max. Current—38 A rms[2]
X-ray generator maximum power—4 kW (max 60 kV, max 100 mA)[3]
Goniometer reproducibility—≤±0.0001°[3]
2θ linearity—±0.01°[3]
Maximum goniometer speed—15 deg/s[3]
Resolution (FWHM on LaB₆)—0.026°[3]
Dimensions (W x D x H)—1400 × 1162 × 1947 mm[3]
Weight—1150 kg[3]
Power supply—Single phase 210–230 V (±10% grid variations), 50/60 Hz[3]
Power consumption—Max. 4.6 kVA without controllers for optional equipment[3]
External cooling water supply—4–6 liters/min, pressure up to 8 bar, temperature 15 to 35 °C[3]
Compressed air supply—2–5 bar (0.2–0.5 MPa)[3]
Radiation level—Less than 1 microSievert per hour at 10 cm distance (Mo source @ 60 kV, 50 mA)[3]
Detector types—PIXcel1D, PIXcel3D, GaliPIX3D; also 1Der, point detectors (proportional counter, scintillation detector)[3]
Capabilities—X-ray diffraction (XRD), small- and wide-angle X-ray scattering (SAXS/WAXS), X-ray reflectivity, X-ray absorption spectroscopy (XAS), grazing incidence XRD, pair distribution function, texture mapping, residual stress measurement, computed tomography[3]
Source wavelengths—Cu Kα₁; also Mo radiation[4]
Temperature range for in situ stages—-200 °C to 1100 °C[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]malvernpanalytical.commalvernpanalytical.com
  4. [4]arxiv.orgarxiv.org
  5. [5]adapt.mines.eduadapt.mines.edu