Waferpedia

Comparison ledger

0010-18024 Pyrometer Assemblyversus311 HM Automated Precision Measurement

Applied Materials 0010-18024 Pyrometer Assembly, Micro-Vu 311 HM Automated Precision Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMicro-Vu
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyMicro-Vu 311 HM Automated Precision Measurement
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]10kg - Scale Resolution: 031 um - XY Accuracy, E2: 2.6+L/175 - Z Accuracy, E1: 3.0+L/150 - Zoom Range: 19.5.1 or 36:1[2]
Measurement Capacity—315 x 315 x 160mm,[2]
Viewed Magnification—20x-390x / 15x-540x[2]
Scale resolution—031 um[2]
XY accuracy, E2—2.6+L/175[2]
Z accuracy, E1—3.0+L/150[2]
Zoom range—19.5.1 or 36:1[2]
Includes—accessories[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing