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Comparison ledger

0010-18024 Pyrometer AssemblyversusNSX 330 B

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation NSX 330 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NSX 330 BOnto Innovation
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation NSX 330
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Programmable light tower[2]
Wafer size—Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer[2]
Category—Metrology & Inspection[3]
Inspection modes—Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer[3]
Resolution flexibility—10µm to 0.5µm[2]
Optics—Programmable illumination filter wheel[3]
Illumination—Programmable light tower; multiple modes of dark field illumination[2]
Control/software—Recipe sharing; recipe server; Discover® Software database results archiving[3]
Options—Teams with edge and backside modules for all-surface solution[2]
Handling—Unique handling solutions (Mems, Taiko, Thin), extreme warpage (>12mm) and ultra-thin (<50µm)[2]
Objective turret—Five available slots; compatible with 1X, 2X, 3X, 5X, 10X, 20X, and 50X objectives[2]
Tool matching—Supported[2]
Vintage—2017[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com