Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Zeiss Supra 55 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Supra 55 VPZeiss |
|---|---|---|
| OEM | Applied Materials | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Zeiss Supra 55 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Variable pressure[2] |
| Windows OS | — | W10[2] |
| Software | — | SmartSEM (v6)[2] |
| Source Type | — | TFE[2] |
| Primary pump | — | turbo[2] |
| Instrument type | — | Field emission scanning electron microscope (FE-SEM)[3] |
| Operating modes | — | High vacuum and variable pressure[3] |
| Field emission cathode | — | Present[4] |
| Accelerating voltage range | — | 100 V to 30 kV[4] |
| Variable pressure range | — | 2 to 133 Pa[3] |
| Magnification | — | 12 to 900,000x[3] |
| Electron image resolution | — | 1.0 nm at 15 kV; 1.7 nm at 1 kV; 3.5 nm at 0.2 kV; 2.0 nm at 30 kV in VP mode[3] |
| Sample stage | — | 5-axes motorized Cartesian sample stage[3] |
| Probe current | — | 4 pA to 10 nA[3] |
| Probe current optional upper limit | — | 20 nA optional[3] |
| Detectors | — | In-lens detector, Everhart-Thornley detector, secondary detector, VP-SE detector, and 4-quadrant backscattered electron detector[4] |
| Accessories | — | EDS detector, EBSD[3] |
| Control system OS | — | Windows 10[2] |
| Secondary electron detector | — | Everhart-Thornley secondary electron detector[2] |
| In-lens detector | — | Present[2] |
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