Waferpedia

Comparison ledger

0010-21246 Partversus5200

Applied Materials 0010-21246 Part, ESI 5200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
5200ESI
OEMApplied MaterialsESI
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESI 5200
Specifications
Rep Rate Range (kHz)—3-20[1]
Max Work Surface Power (W)—1.9[1]
Pulse Width (ns)—22+/-10 @3kHz, 35 @10kHz, 55+/-30 @18kH[1]
Repetition Rate Range—3-20 kHz[1]
Max Work Surface Power—1.9 W[1]
Pulse Width @3kHz—22±10 ns[1]
Pulse Width @10kHz—35 ns[1]
Pulse Width @18kHz—55±30 ns[1]
Vintage—1998[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing