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0010-22161 High EFF RF MatchversusEpsilon E 2000 Plus

Applied Materials 0010-22161 High EFF RF Match, ASM Epsilon E 2000 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-22161 High EFF RF MatchApplied Materials
Epsilon E 2000 PlusASM
OEMApplied MaterialsASM
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchASM Epsilon
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—RP & SiGe[3]
Leak Detector—H2, HCL for RIKEN KEIKI[3]
SIDE CAR—H2, N2, HCL Purefire[3]
GAS—H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[3]
MFC—Horiba STEC Z500 series[3]
Special—Veeco LOREX 15slm model included[3]
Wafer Sizes—4 inch[3]
Vintage—2011[3]
Gases—H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[3]
0010-22161 High EFF RF Match entryEpsilon E 2000 Plus entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing