Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Axcelis Fusion 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | Fusion 200Axcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Axcelis Fusion 200 |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | Fusion 200[4] |
| Description | HTESC PH 1 REV A[3] | UV Bake[1] |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Manufacturer | — | Axcelis[4] |
| Version | — | 200 mm[1] |
| Has CE mark | — | Yes[1] |
| Loading | — | 200 mm open cassette loading[1] |
| Power | — | 380 / 220 VAC[1] |
| Configuration | — | Through the wall type[1] |
| Robot type | — | 2-d robot type[1] |
| Irradiator | — | 4.3 KW[1] |