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0010-22161 High EFF RF MatchversusELS 6610

Applied Materials 0010-22161 High EFF RF Match, Cymer ELS 6610, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsCymer
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF Match—
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]ELS 6610[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Equipment Type—Excimer Laser[3]
Application—Lithography light source[4]
Technology—Deep ultraviolet (DUV)[5]
Version—Facilities[3]
Manufacturer—Cymer[3]
Laser Type—Excimer Laser[3]
Used In—ASML PAS 5500/850 D[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]moov.comoov.co
  5. [5]waferpedia.comwaferpedia.com