Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards E 2 M 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | E 2 M 2Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards E 2 M 2 |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Maximum displacement (50 Hz) | — | 2.8 m³/h[3] |
| Maximum displacement (60 Hz) | — | 3.4 m³/h[3] |
| Pneurop displacement (50 Hz) | — | 2.4 m³/h[3] |
| Pneurop displacement (60 Hz) | — | 2.9 m³/h[3] |
| Ultimate vacuum (partial pressure, no gas-ballast) | — | 2.5×10⁻⁴ mbar[3] |
| Ultimate vacuum (total pressure, no gas-ballast) | — | 1×10⁻³ mbar[3] |
| Ultimate vacuum (partial pressure, full gas-ballast) | — | 3×10⁻² mbar[3] |
| Maximum water vapour inlet pressure | — | 15 mbar[3] |
| Maximum water vapour pumping rate | — | 0.03 kg/h[3] |
| Maximum permitted outlet pressure (at full pump throughput) | — | 0.5 bar gauge[3] |
| Motor rotational speed (50 Hz) | — | 1450 rpm[3] |
| Motor rotational speed (60 Hz) | — | 1750 rpm[3] |
| Recommended oil | — | Ultragrade 19[3] |
| Maximum oil capacity | — | 0.55 litre[3] |
| Dimensions (A x B, single-phase motor variant) | — | 449 mm x 131 mm[3] |
| Ambient temperature range (operation) | — | 12 to 40 °C[3] |
| Ambient temperature range (storage) | — | -30 to 70 °C[3] |