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0010-22161 High EFF RF MatchversusVision 2000-E™

Applied Materials 0010-22161 High EFF RF Match, MKS Vision 2000-E™, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchMKS Vision 2000-E™
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Product type—Residual Gas Analyzer (Mass Spectrometer)[3]
Application—Multi-pressure, CVD & ALD processes[3]
Minimum detectable partial pressure—< 2e-11 Torr[3]
Monitoring capability—Continuous in situ monitoring[3]
Leak and contamination monitoring—Baseline monitoring for air leaks and background contamination[3]
Vacuum safety—Remote Vacuum Controller (RVC) for failsafe vacuum operation[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com