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0010-22161 High EFF RF MatchversusNanospec 9300 Film Analysis

Applied Materials 0010-22161 High EFF RF Match, Onto Innovation Nanospec 9300 Film Analysis, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsOnto Innovation
Category——
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchOnto Innovation Nanospec 9300 Film Analysis
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]Nanospec 9300[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—Onto Innovation / Nanometrics[3]
Tool type—Film Analysis System[4]
Measurement application—Thin film thickness measurement[5]
Instrument type—Spectroscopic Reflectometer (SR)[5]
Configured wafer size—12"[5]
Alternate wafer handling—Can be modified for 8" open cassette handling[5]
Visible light source—Tungsten halogen lamp[5]
UV light source—Deuterium arc lamp[5]
Lens—4x, 15x (Visible & UV)[5]
System computer and monitor—Computer & LCD monitor[5]
Metrology software—Windows XP-based N2000 metrology software (Version N2000 4.2.90 Beta)[5]
Head type—UV DIO[5]
Video camera—RS170 (B/W)[5]
Wafer handling—Kensington Robot & Stage Asyst FOUP 300mm[5]
Input power—208 VAC, 18 A, 50/60 Hz[5]
Optics—4x, 15x (Visible & UV)[3]
Vintage year—2002[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]wotol.comwotol.com