Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusTPU 062 Turbomolecular Vacuum

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TPU 062 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer TPU 062 Turbomolecular Vacuum
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Inlet flange—DN 63 CF-F[3]
Outlet flange—DN 16 ISO-KF[3]
Pumping speed (N2)—56 l/s[3]
Final pressure—1 x 10^-11[3]
Bearing type (high vacuum side)—wear free permanent magnetic bearing[3]
Bearing type (backing side)—oil lubricated ceramic bearing[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]ajvs.comajvs.com