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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus2200 evo advanced

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, Besi 2200 evo advanced, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBesi
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedBesi 2200 evo advanced
Cited variants—
  • Datacon 2200 evo[1]
Specifications
ConfigurationRefurbished[2]—
Type—G4[3]
Voltage—400 VAC[3]
Phase—3 Phase[3]
Power—2.3 kVA[3]
Max Current—3.3 A[3]
Main Breaker—D16 A[3]
SCCR—5 kA[3]
Vacuum—-0.08 MPa[3]
Compressed Air—0.60 MPa[3]
Nitrogen—0.10 MPa[3]
Weight—1,500 kg[3]
X/Y placement accuracy—± 3 µm @ 3s[4]
Theta placement accuracy—± 0.07° @ 3s[4]
Bond force range—0.5N to 25N[4]
UPH die attach—up to 7,000 UPH/module[4]
UPH flip chip with dipping—up to 2,500 UPH/module[4]
UPH flip chip without dipping—up to 3,200 UPH/module[4]
Machine dimensions (L x D x H)—1,160 mm x 1,225 mm x 1,750 mm[4]
Uptime—> 98 %[4]
Yield—> 99.95 %[4]
Die size die attach—0.15 mm - 30 mm[4]
Die size flip chip—0.5 mm - 30 mm[4]
Die thickness—>50 µm (thinner on request)[4]
Wafer size—4" - 12" (SEMI M1)[4]
Frame sizes—FF070, FF105, FF108, FF123[4]
Substrate working range—13" x 8" (325 mm x 200 mm)[4]
Heated bond head max temperature—450°C[4]
UV curing power—up to 2,000 mW/cm2 (365 / 405 nm)[4]
Bond rotation—0° - 360°[4]
Number of pickup tools/nozzles—up to 14[4]
Number of eject tools—5[4]
Number of epoxies/adhesives in single pass—3[4]
Bond force—0.5 N – 25 N programmable[4]
Machine dimensions (LxDxH)—1,160 mm x 1,225 mm x 1,750 mm[4]
Flip chip die size—0.5 mm – 30 mm[4]
Heated bond head (optional)—up to 450 °C[4]
UV curing (optional)—up to 2,000 mW/cm² (365/405 nm)[4]
Supply voltage—400 VAC, 3 phase, 50/60 Hz, 2.3 kVA[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]besi.combesi.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]besi.combesi.com
  5. [5]semiconductor.directorysemiconductor.directory