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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus520 IS Wafer

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 520 IS Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
520 IS WaferEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—Manual wafer load substrate bonder
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedEV Group 520
Specifications
ConfigurationRefurbished[1]Refurbished[2]
Wafer size—Manual wafer load substrate bonder[3]
Max Bond Force—60 kN[3]
Top side heater—550°C max. in 1°C steps[3]
Bottom side heater—550°C max. in 1°C steps[3]
Temperature uniformity—± 1,5 %[3]
OEM—EV Group[2]
Model—520 IS Wafer[2]
Category—Packaging & Bonding[4]
Description—Manual wafer load substrate bonder[4]
Bonding capabilities—Capable of fusion compression bonding, thermal compression bonding, and optional anodic bonding[3]
Bond chamber—High-vacuum capable bond chamber[3]
Control software—Windows based control software and operation interface[3]
Top side heater max temperature—550°C in 1°C steps[3]
Bottom side heater max temperature—550°C in 1°C steps[3]
Included items—Chiller; turbo pump & controller; roughing pump; system computer, monitor, and keyboard[3]
Other stated features—Auto opening of bond tool cover; high-vacuum capable bond chamber; ideal for R&D and pilot production applications[3]
Vintage—2008[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com