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0010-47763 ASSY ESC Bonded Monopolar Dual HeatedversusFC 250

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, SUSS MicroTec FC 250, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
FC 250SUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedSUSS MicroTec FC 250
Specifications
ConfigurationRefurbished[1]With a Julabo FLW1703 Chiller[2]
Maximum chip/substrate temperature—450°C[3]
Bonding force range—10 gf to 200 kgf[3]
Alignment accuracy (X/Y)—1 µm at 3σ[3]
Optical magnification—400X[3]
Objective numerical aperture—0.3[3]
Heating rate—30 °C/s to 100 °C/s[3]
Stage resolution—0.1 µm[3]
Minimum device size—250 µm × 300 µm[3]
Granite plate flatness—2 µm[3]
Stage size—2 × 2 inches[2]
Tool type—die bonder[4]
Application—high-accuracy automated packaging of optoelectronic devices[3]
Alignment accuracy—1 µm at 3σ[3]
Maximum temperature—450°C[3]
Chiller—Julabo FLW1703[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]web.archive.orgweb.archive.org
  4. [4]waferpedia.comwaferpedia.com