Waferpedia

Comparison ledger

0010 47763versusRainbow 4420

Applied Materials 0010 47763, Lam Research Rainbow 4420, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
Rainbow 4420Lam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1994 Vintage year
Control system——
Generation——
FamilyApplied Materials 0010 47763Lam Research Rainbow 4420
Cited variants—
  • Rainbow 4420 Plasma Etcher, 8"[1]
Specifications
Configuration2nd Source New[2]Refurbished[5]
TypeMonopolar Dual Heated[3]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[3]—
Model0010-47763[2]—
OEMApplied Materials[2]—
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[3]—
Quantity available (source)1[3]—
Software version—Envision 1.5 Release[1]
Handler System—Harmonics Arm (2)[1]
Volts—208[1]
Wafer Shape—8" flat zone[6]
Process—Poly Etch[6]
Software—Envision 1.5[6]
Wafer Aligner—Universal[7]
Wafer Sizes—8 inch[1]
Software Version—Envision 1.5[1]
CIM SECS—Yes[1]
Factory Interface—SMIF (2)[1]
LL Pump—Yes[1]
TCU 2080—Yes[1]
AC Rack—Yes[1]
PC Pump—Yes[1]
Vintage—1994[1]
Dry Pump—Yes[6]
Chiller—Yes[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]saulcontrol.comsaulcontrol.com
  4. [4]getspares.comgetspares.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing