Waferpedia

Comparison ledger

0020 18455 PartversusSRH 420 MC Backside

Applied Materials 0020 18455 Part, Ulvac SRH 420 MC Backside, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartUlvac SRH 420 MC Backside
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Type—Backside Sputter[2]
Wafer size—6 inch[2]
Vintage—2005[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing