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Comparison ledger

0020 18698 PartversusCentura 5200 High K

Applied Materials 0020 18698 Part, Applied Materials Centura 5200 High K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
Centura 5200 High KApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartApplied Materials Centura 5200
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]Incl gas box and remote frame[2]
Manufacturer—Applied Materials[2]
Model—Centura 5200 High K[2]
Wafer size—8 inch[2]
Category—Deposition[3]
Process type—Depositing high-k dielectric films[4]
Platform family—Applied Materials Centura platform family[4]
Unit type—Single chamber unit, not a complete cluster tool[4]
Chamber version—200 mm[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]fabsurplus.comfabsurplus.com