Waferpedia

Comparison ledger

0041-26723 Bonded AssemblyversusHVM3

Applied Materials 0041-26723 Bonded Assembly, MRSI HVM3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
HVM3MRSI
OEMApplied MaterialsMRSI
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run—2018–
Lifecycle——
Lifecycle milestones—2019 Name change
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyMRSI HVM3
Cited variants—
Specifications
Application—Microwave modules, hybrid, optical modules, epoxy and eutectic die bonding[3]
Placement accuracy—3 microns, 3 sigma, true radial placement (depending on application)[3]
Placement repeatability—≤ 1 micron[3]
XY motors—Brushless DC linear motors with glass-scale encoder resolution of 50 nm[3]
X travel—17.5 in (444.5 mm)[3]
Y travel—36.0 in (914.4 mm)[3]
Z travel—1.5 in (38.1 mm)[3]
Theta travel—360°[3]
Theta resolution—0.0045°[3]
Pressure control—10 g to 5 kg per placement[3]
Cameras—2 down-looking cameras sharing an optical path; 1 up-looking camera[3]
Vision system—Edge detection and pattern recognition[3]
Lighting—Red, green, and blue; ring or coaxial illumination; programmable intensity[3]
Pickup nozzles—13 in standard nozzle changer; multiple changers optional; can also carry epoxy dispensing heads[3]
Waffle packs—Up to 72 2 x 2 in waffle packs (50.8 x 50.8 mm) or Gel-Paks™ or 4 x 4 in (101.6 x 101.6 mm)[3]
Tape and reel feeders—Up to ten 8 mm tape and reel feeders[3]
Eutectic bonding—Programmable ramp rate; maximum temperature 450°C[3]
Process gases—Nitrogen, argon, N2-H2, or Ar-H2[3]
Dispense pumps—2 syringe rotary screw pumps or time/pressure-controlled pumps[3]
Dispense height sensing—3-point laser height mapping of the substrate plane[3]
Dispense needle cleaning—Automated programmable cleaning between pattern dispense intervals[3]
Dispense needle calibration—Automatic software calibration using beam sensor[3]
Repeatability—≤ 1 µm[3]
Minimum chip size—0.008 sq. inch (200 sq. micron)[3]
Illumination—RGB; ring or coaxial; intensity programmable[3]
Eutectic temperature—up to 450ºC[3]
Minimum placement force (closed loop)—10 g[3]
Maximum placement force (closed loop)—5 kg[3]

Plan your fab

Building a Packaging & Bonding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]mycronic.commycronic.com
  3. [3]web.archive.orgweb.archive.org