Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research 2300 Exelan Flex, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 2300 Exelan FlexLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research 2300 |
| Specifications | ||
| Voltage | — | 208 VAC[1] |
| Configuration | — | 50/60 Hz[1] |
| Full Load Current | — | 56 A[1] |
| Main CB Current Rating | — | 70 A[1] |
| Wafer Size | — | 12 inch (300 mm)[2] |
| Frequency | — | 50/60 Hz[1] |
| Make | — | Lam[2] |
| Model | — | 2300 Exelan Flex[2] |
| Wafer Sizes | — | 12 inch[2] |
| Equipment type | — | Etch Chamber[2] |
| Power | — | 208 VAC, 50/60 Hz[1] |
| Vintage | — | 2006[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →