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0041-39086 ESC PartversusAlliance A 6 TCP 9600 PTX Metal

Applied Materials 0041-39086 ESC Part, Lam Research Alliance A 6 TCP 9600 PTX Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Alliance A 6 TCP 9600 PTX MetalLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Alliance A 6 TCP 9600 PTX Metal
Specifications
Phase—3 Phase[1]
Voltage—208 Vac[1]
OEM—Lam Research[2]
Model—Alliance A 6 TCP 9600 PTX Metal[2]
Category—Etch[3]
Wafer size—8 inch[2]
Power & electrical—3 Phase - 4 Wire + Ground - 208 Vac[2]
Chambers—(2) 9600PTX Chambers[2]
0041-39086 ESC Part entryAlliance A 6 TCP 9600 PTX Metal entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com