Waferpedia

Comparison ledger

0041-39086 ESC PartversusParadigme

Applied Materials 0041-39086 ESC Part, Mattson Paradigme, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
ParadigmeMattson
OEMApplied MaterialsMattson
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Mattson Paradigme
Cited variants—
  • Paradigme XP Light[1]
Specifications
Manufacturer—Mattson[2]
Model—Paradigme[2]
Category—Etch[3]
Wafer size—300 mm[1]
Process node—20-nanometer technology node and below[4]
Chamber design—two-wafer chamber design[4]
Plasma source—proprietary plasma source[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]semiconductoronline.comsemiconductoronline.com