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0242-36515 RTP XE Chamber Temperature Match KitversusCO 139

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, ASM CO 139, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsASM
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
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Family—ASM CO 139
Specifications
Power Rating—110 VAC 50/60 Hz[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing