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0242-36515 RTP XE Chamber Temperature Match KitversusRapidCure 320 FC Radiator UV Anneal

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Axcelis RapidCure 320 FC Radiator UV Anneal, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsAxcelis
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Axcelis RapidCure 320 FC Radiator UV Anneal
Specifications
Manufacturer—Axcelis[1]
Model—RapidCure 320 FC[2]
Equipment type—Radiator UV Anneal System[2]
Asset #—82317[2]
Vintage—2006[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing