Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match Kitversus200

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Blue M 200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200Blue M
OEMApplied MaterialsBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Blue M 200
Specifications
Temperature range—200°C to 437°C[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]snfguide.stanford.edusnfguide.stanford.edu